Abstract
A triple bubbler system includes a first fluid probe, a second fluid probe, a third fluid probe, a gas source operably coupled to the first fluid probe, the second fluid probe, and the third fluid probe and configured to meter gas through the first fluid probe, the second fluid probe, and the third fluid probe to form bubbles at tips of each of the first fluid probe, the second fluid probe, and the third fluid probe, and a cover member disposed over the tips of the first, second, and third fluid probes and configured to at least partially prevent bubbles formed and escaping the tips of the first, second, and third fluid probes from interfering with other bubbles formed at each other tips. The bubbler system includes a thermocouple having a plurality of junctions disposed along an axis parallel to longitudinal axes of the first, second, and third fluid probes.
| Original language | English |
|---|---|
| Patent number | US11747256B2 |
| State | Published - Sep 5 2023 |
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