@article{06636b4673bc48568cff2d3b39faebbf,
title = "Molecular beam epitaxy of GaAs templates on water soluble NaCl thin films",
abstract = "Expensive III-V substrates are cost limiting for the adoption of many technologies. Thus, being able to reuse the original substrate is highly desirable. Existing substrate reuse techniques have significant drawbacks, but this work discusses a new method using molecular beam epitaxy deposition of water soluble NaCl thin films on commonly employed (0 0 1) GaAs substrates. Single-crystal GaAs templates are grown on continuous NaCl layers utilizing careful exposure of the NaCl to an in-situ electron beam and a low temperature nucleation layer. The template layers can be quickly removed from the substrate via dissolution of the NaCl. After liftoff, the original wafer shows an increase in rms surface roughness of only 0.2 nm.",
keywords = "A1. Nucleation, A1. Reflection high energy electron diffraction, A1. Substrates, A3. Molecular beam epitaxy, B1. Salts, B2. Semiconducting gallium arsenide",
author = "May, {Brelon J.} and Kim, {Jae Jin} and Patrick Walker and Moutinho, {Helio R.} and McMahon, {William E.} and Ptak, {Aaron J.} and Young, {David L.}",
note = "Funding Information: This work was authored in part by the National Renewable Energy Laboratory, operated by Alliance for Sustainable Energy, LLC, for the U.S. Department of Energy (DOE) under Contract No. DE-AC36-08GO28308. Funding provided by Shell International Exploration and Production Inc., Houston, USA. The views expressed in the article do not necessarily represent the views of the DOE or the U.S. Government. The U.S. Government retains and the publisher, by accepting the article for publication, acknowledges that the U.S. Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this work, or allow others to do so, for U.S. Government purposes. Funding Information: This work was authored in part by the National Renewable Energy Laboratory, operated by Alliance for Sustainable Energy, LLC, for the U.S. Department of Energy (DOE) under Contract No. DE-AC36-08GO28308. Funding provided by Shell International Exploration and Production Inc. Houston, USA. The views expressed in the article do not necessarily represent the views of the DOE or the U.S. Government. The U.S. Government retains and the publisher, by accepting the article for publication, acknowledges that the U.S. Government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this work, or allow others to do so, for U.S. Government purposes. Publisher Copyright: {\textcopyright} 2022 Elsevier B.V.",
year = "2022",
month = may,
day = "15",
doi = "10.1016/j.jcrysgro.2022.126617",
language = "English",
volume = "586",
journal = "Journal of Crystal Growth",
issn = "0022-0248",
publisher = "Elsevier B.V.",
}