TY - GEN
T1 - Heat transfer enhancement measurement for microfabricated electrostatic fluid accelerators
AU - Hsu, C. P.
AU - Jewell-Larsen, N. E.
AU - Sticht, C.
AU - Krichtafovitch, I. A.
AU - Mamishev, A. V.
PY - 2008
Y1 - 2008
N2 - Air cooling, because of its simplicity, remains as the most popular cooling solution for microelectronics in the consumer market. However, the trend of increasing heat generation in microelectronics and the demand for compact devices result in heat fluxes approaching the limit of conventional rotary fan air cooling technology. Electrostatic fluid accelerators (EFAs), also known as electrohydrodynamic (EHD) ionic wind pumps, have the potential of becoming a critical element of electronic thermal management solutions. In this technique, application of voltage to a sharp electrode ionizes air molecules, which are propelled by the electric field, transferring part of their energy to neutral air molecules, thus creating airflow and cooling. The airflow, so called "corona wind", can be used discretely for hot spot cooling or integrated into a compact thermal exchange surface to decrease the fluid boundary layer and increase heat transfer enhancement. The EFA investigated in this study consists of a microfabricated AFM-cantilever corona electrode using combination of deep reactive ion etching (DRIE) and reactive ion etching (RIE), and a flat collecting electrode that doubles as the thermal exchange surface. The fabrication and testing results of a microfabricated EFA are presented in paper. Free and EFA-enhanced forced convection heat transfers are both reported by measuring the heating power difference of the collecting electrode under constant surface temperature.
AB - Air cooling, because of its simplicity, remains as the most popular cooling solution for microelectronics in the consumer market. However, the trend of increasing heat generation in microelectronics and the demand for compact devices result in heat fluxes approaching the limit of conventional rotary fan air cooling technology. Electrostatic fluid accelerators (EFAs), also known as electrohydrodynamic (EHD) ionic wind pumps, have the potential of becoming a critical element of electronic thermal management solutions. In this technique, application of voltage to a sharp electrode ionizes air molecules, which are propelled by the electric field, transferring part of their energy to neutral air molecules, thus creating airflow and cooling. The airflow, so called "corona wind", can be used discretely for hot spot cooling or integrated into a compact thermal exchange surface to decrease the fluid boundary layer and increase heat transfer enhancement. The EFA investigated in this study consists of a microfabricated AFM-cantilever corona electrode using combination of deep reactive ion etching (DRIE) and reactive ion etching (RIE), and a flat collecting electrode that doubles as the thermal exchange surface. The fabrication and testing results of a microfabricated EFA are presented in paper. Free and EFA-enhanced forced convection heat transfers are both reported by measuring the heating power difference of the collecting electrode under constant surface temperature.
KW - Corona wind
KW - Electrohydrodynamic (EHD) ionic wind pump
KW - Electrostatic fluid accelerators (EFAs)
UR - http://www.scopus.com/inward/record.url?scp=51449098571&partnerID=8YFLogxK
U2 - 10.1109/STHERM.2008.4509362
DO - 10.1109/STHERM.2008.4509362
M3 - Conference contribution
AN - SCOPUS:51449098571
SN - 9781424421237
T3 - Annual IEEE Semiconductor Thermal Measurement and Management Symposium
SP - 32
EP - 38
BT - 24th Annual IEEE Semiconductor Thermal Measurement and Management Symposium - Proceedings 2008, SEMI-THERM
T2 - 24th Annual IEEE Semiconductor Thermal Measurement and Management Symposium, SEMI-THERM 2008
Y2 - 16 March 2008 through 20 March 2008
ER -