Abstract
A full-field view laser ultrasonic imaging method has been developed that measures acoustic motion at a surface without scanning. Images are recorded at normal video frame rates by employing dynamic holography using photorefractive interferometric detection. By extending the approach to ultra high frequencies, an acoustic microscope has been developed capable of operation on the nanosecond time and micron length scales. Both acoustic amplitude and phase are recorded allowing full calibration and determination of phases to within a single arbitrary constant. Results are presented of measurements at frequencies at 800-900 MHz illustrating a multitude of normal mode behavior in electrically driven thin film acoustic resonators. Coupled with microwave electrical impedance measurements, this imaging mode provides an exceptionally fast method for evaluation of electric to acoustic coupling and performance of these devices. Images of 256×240 pixels are recorded at 18Hz rates synchronized to obtain both in-phase and quadrature detection of the-acoustic motion. Simple averaging provides sensitivity to the subnanometer level calibrated over the image using interferometry. Identification of specific acoustic modes and their relationship to electrical impedance characteristics show the advantages and overall high speed of the technique.
| Original language | English |
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| Pages (from-to) | 601-604 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| State | Published - 2002 |
| Event | 2002 IEEE Ultrasonics Symposium - Munich, Germany Duration: Oct 8 2002 → Oct 11 2002 |