@article{8e809bfd5bf54d34bebf0f313f81849c,
title = "Elimination of remnant phases in low-temperature growth of wurtzite ScAlN by molecular-beam epitaxy",
abstract = " Growth of wurtzite Sc x Al 1−x N (x < 0.23) by plasma-assisted molecular-beam epitaxy on c-plane GaN at high temperatures significantly alters the extracted lattice constants of the material due to defects likely associated with remnant phases. In contrast, ScAlN grown below a composition-dependent threshold temperature exhibits uniform alloy distribution, reduced defect density, and atomic-step surface morphology. The c-plane lattice constant of this low-temperature ScAlN varies with composition as expected from previous theoretical calculations and can be used to reliably estimate alloy composition. Moreover, lattice-matched Sc 0.18 Al 0.82 N/GaN multi-quantum wells grown under these conditions display strong and narrow near-infrared intersubband absorption lines that confirm advantageous optical and electronic properties. ",
author = "Brandon Dzuba and Trang Nguyen and Amrita Sen and Diaz, \{Rosa E.\} and Megha Dubey and Mukesh Bachhav and Wharry, \{Janelle P.\} and Manfra, \{Michael J.\} and Oana Malis",
note = "Funding Information: We acknowledge support from the National Science Foundation (NSF). T.N. and O.M. acknowledge partial support from NSF under Award No. DMR-2004462. A.S., M.B., and J.P.W. acknowledge partial support from the Center for Thermal Energy Transport Under Irradiation, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Basic Energy Sciences. All STEM imaging and analyses were performed at the Electron Microscopy Facility at the Birck Nanotechnology Center, Purdue University. APT characterization was performed at the Center for Advanced Energy Studies, with support from the U.S. Department of Energy, Office of Nuclear Energy, through Nuclear Science User Facilities (NSUF) under Award No. 20-2946. Funding Information: We acknowledge support from the National Science Foundation (NSF). T.N. and O.M. acknowledge partial support from NSF under Award No. DMR-2004462. A.S., M.B., and J.P.W. acknowledge partial support from the Center for Thermal Energy Transport Under Irradiation, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Basic Energy Sciences. All STEM imaging and analyses were performed at the Electron Microscopy Facility at the Birck Nanotechnology Center, Purdue University. APT characterization was performed at the Center for Advanced Energy Studies, with support from the U.S. Department of Energy, Office of Nuclear Energy, through Nuclear Science User Facilities (NSUF) under Award No. 20-2946. Publisher Copyright: {\textcopyright} 2022 Author(s).",
year = "2022",
month = nov,
day = "7",
doi = "10.1063/5.0118075",
language = "English",
volume = "132",
pages = "175701",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "17",
}