Design, Fabrication, and Operation of Pilot-Scale Chemical Vapor Deposition Equipment

Stephanie H. Bruffey; Brian C. Jolly

doi:10.13182/T127-39780

Design, Fabrication, and Operation of Pilot-Scale Chemical Vapor Deposition Equipment

Stephanie H. Bruffey
, Brian C. Jolly

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	559-560
Number of pages	2
Journal	Transactions of the American Nuclear Society
Volume	127
Issue number	1
Early online date	2022
DOIs	https://doi.org/10.13182/T127-39780
State	Published - 2022
Externally published	Yes
Event	2022 Transactions of the American Nuclear Society Winter Meeting and Technology Expo, ANS 2022 - Phoenix, United States Duration: Nov 13 2022 → Nov 17 2022

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title = "Design, Fabrication, and Operation of Pilot-Scale Chemical Vapor Deposition Equipment",

author = "Bruffey, \{Stephanie H.\} and Jolly, \{Brian C.\}",

year = "2022",

doi = "10.13182/T127-39780",

language = "English",

volume = "127",

pages = "559--560",

journal = "Transactions of the American Nuclear Society",

issn = "0003-018X",

publisher = "American Nuclear Society",

number = "1",

note = "2022 Transactions of the American Nuclear Society Winter Meeting and Technology Expo, ANS 2022 ; Conference date: 13-11-2022 Through 17-11-2022",

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T1 - Design, Fabrication, and Operation of Pilot-Scale Chemical Vapor Deposition Equipment

AU - Bruffey, Stephanie H.

AU - Jolly, Brian C.

PY - 2022

Y1 - 2022

UR - https://www.scopus.com/pages/publications/85179802204

U2 - 10.13182/T127-39780

DO - 10.13182/T127-39780

M3 - Conference article

AN - SCOPUS:85179802204

SN - 0003-018X

VL - 127

SP - 559

EP - 560

JO - Transactions of the American Nuclear Society

JF - Transactions of the American Nuclear Society

IS - 1

T2 - 2022 Transactions of the American Nuclear Society Winter Meeting and Technology Expo, ANS 2022

Y2 - 13 November 2022 through 17 November 2022

ER -

Design, Fabrication, and Operation of Pilot-Scale Chemical Vapor Deposition Equipment

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