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Coupled electro-thermal mechanical analyses for SMM actuators development
C. Channy Wong
, Randy R. Lober
,
Jason D. Hales
Nuclear Science & Technology
Research output
:
Contribution to journal
›
Conference article
›
peer-review
2
Scopus citations
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Keyphrases
Physics Analysis
100%
Coupled Physics
100%
Actuator
100%
Thermo-mechanical Analysis
100%
Electro-thermo-mechanical
100%
Surface Micromachining
100%
Mechanical Response
50%
Analysis Code
50%
Electrical Conductivity
50%
Temperature Effect
50%
Temperature Distribution
50%
Strongly Coupled
50%
Thermoelectric Properties
50%
Thermal Response
50%
Design Optimization
50%
Mechanical Equation
50%
Comprehensive Simulation
50%
Electrostatic Analysis
50%
Electrical Response
50%
Local Joule Heating
50%
Microactuators
50%
Electrothermal Actuator
50%
Thermodynamic Equation
50%
Electrostatic Equation
50%
Material Science
Surface (Surface Science)
100%
Mechanical Testing
100%
Actuator
100%
Electrical Resistivity
25%
Resistance Heating
25%
Joule Heating
25%
Engineering
Actuator
100%
Thermal Mechanical Analysis
100%
Electrostatic Force
50%
Mechanical Response
25%
Analysis Code
25%
Temperature Distribution
25%
Resistance Heating
25%
Physics
Actuator
100%
Physics
50%
Electrostatics
50%
Temperature Distribution
25%