Coatings of Fe/FeAlN thin films

Yuandan Liu; R. E. Miller; Tao Zhang; Qiquan Feng; W. Votava; Dingqiang Li; L. N. Dunkleberger; X. W. Wang; R. Gray; T. Bibens; J. Helfer; K. Mooney; R. Nowak; P. Lubitz; Yanwen Zhang

Coatings of Fe/FeAlN thin films

Yuandan Liu
, R. E. Miller
, Tao Zhang
, Qiquan Feng
, W. Votava
, Dingqiang Li
, L. N. Dunkleberger
, X. W. Wang
, R. Gray
, T. Bibens
, J. Helfer
, K. Mooney
, R. Nowak
, P. Lubitz
, Yanwen Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report new results on materials properties of Fe/FeAlN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were Fe_xAl_1-x, where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS and ESCA (XPS).

Original language	English
Title of host publication	Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites
Pages	265-275
Number of pages	11
Edition	3
State	Published - 2006
Externally published	Yes
Event	Advanced Ceramic Coatings and Interfaces - 30th International Conference on Advanced Ceramics and Composites - Cocoa Beach, FL, United States Duration: Jan 22 2006 → Jan 27 2006

Publication series

Name	Ceramic Engineering and Science Proceedings
Number	3
Volume	27
ISSN (Print)	0196-6219

Conference

Conference	Advanced Ceramic Coatings and Interfaces - 30th International Conference on Advanced Ceramics and Composites
Country/Territory	United States
City	Cocoa Beach, FL
Period	01/22/06 → 01/27/06

Cite this

Liu, Y., Miller, R. E., Zhang, T., Feng, Q., Votava, W., Li, D., Dunkleberger, L. N., Wang, X. W., Gray, R., Bibens, T., Helfer, J., Mooney, K., Nowak, R., Lubitz, P., & Zhang, Y. (2006). Coatings of Fe/FeAlN thin films. In Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites (3 ed., pp. 265-275). (Ceramic Engineering and Science Proceedings; Vol. 27, No. 3).

@inproceedings{44623b34cb1d4fb0b3e0d770cbbd4e31,

title = "Coatings of Fe/FeAlN thin films",

abstract = "We report new results on materials properties of Fe/FeAlN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were FexAl1-x, where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS and ESCA (XPS).",

author = "Yuandan Liu and Miller, \{R. E.\} and Tao Zhang and Qiquan Feng and W. Votava and Dingqiang Li and Dunkleberger, \{L. N.\} and Wang, \{X. W.\} and R. Gray and T. Bibens and J. Helfer and K. Mooney and R. Nowak and P. Lubitz and Yanwen Zhang",

year = "2006",

language = "English",

isbn = "0470080531",

series = "Ceramic Engineering and Science Proceedings",

number = "3",

pages = "265--275",

booktitle = "Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites",

edition = "3",

note = "Advanced Ceramic Coatings and Interfaces - 30th International Conference on Advanced Ceramics and Composites ; Conference date: 22-01-2006 Through 27-01-2006",

}

Liu, Y, Miller, RE, Zhang, T, Feng, Q, Votava, W, Li, D, Dunkleberger, LN, Wang, XW, Gray, R, Bibens, T, Helfer, J, Mooney, K, Nowak, R, Lubitz, P & Zhang, Y 2006, Coatings of Fe/FeAlN thin films. in Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites. 3 edn, Ceramic Engineering and Science Proceedings, no. 3, vol. 27, pp. 265-275, Advanced Ceramic Coatings and Interfaces - 30th International Conference on Advanced Ceramics and Composites, Cocoa Beach, FL, United States, 01/22/06.

Coatings of Fe/FeAlN thin films. / Liu, Yuandan; Miller, R. E.; Zhang, Tao et al.
Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites. 3. ed. 2006. p. 265-275 (Ceramic Engineering and Science Proceedings; Vol. 27, No. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Coatings of Fe/FeAlN thin films

AU - Liu, Yuandan

AU - Miller, R. E.

AU - Zhang, Tao

AU - Feng, Qiquan

AU - Votava, W.

AU - Li, Dingqiang

AU - Dunkleberger, L. N.

AU - Wang, X. W.

AU - Gray, R.

AU - Bibens, T.

AU - Helfer, J.

AU - Mooney, K.

AU - Nowak, R.

AU - Lubitz, P.

AU - Zhang, Yanwen

PY - 2006

Y1 - 2006

N2 - We report new results on materials properties of Fe/FeAlN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were FexAl1-x, where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS and ESCA (XPS).

AB - We report new results on materials properties of Fe/FeAlN thin films. Films were fabricated via a pulsed DC sputtering technique. Sputtering target materials were FexAl1-x, where x varies from 0.025 to 1. Film thickness varied from 0.01 to 4 micrometers, and particle size varied from 5 to 100 nanometers, depending on the fabrication conditions and target materials. A film with 22 layers was also fabricated via the sputtering technique. Materials properties of the films were analyzed by SEM/EDS, XRD, RBS and ESCA (XPS).

UR - https://www.scopus.com/pages/publications/33845947620

M3 - Conference contribution

AN - SCOPUS:33845947620

SN - 0470080531

SN - 9780470080535

T3 - Ceramic Engineering and Science Proceedings

SP - 265

EP - 275

BT - Advanced Ceramic Coatings and Interfaces - A Collection of Papers Presented at the 30th International Conference on Advanced Ceramics and Composites

T2 - Advanced Ceramic Coatings and Interfaces - 30th International Conference on Advanced Ceramics and Composites

Y2 - 22 January 2006 through 27 January 2006

ER -

Coatings of Fe/FeAlN thin films

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