Calculation of electron-beam induced displacement in thin films by using parameter-reduced formulas

Keyphrases

• Electron Beam 100%
• Induced Displacement 100%
• Number of Collisions 100%
• Average Displacement 66%
• Mott Cross Section 66%
• Radiation Damage 33%
• Accurate Method 33%
• Film Thickness 33%
• Atomic number 33%
• Cascade Simulation 33%
• Damage Cascade 33%
• Data Fitting 33%
• Energy Transfer 33%
• Deflection Angle 33%
• Quick Method 33%
• Collision Energy 33%
• Scattering Theory 33%
• Electron Collisions 33%
• Relativistic Electrons 33%
• Electron-atom Collisions 33%
• Mont Carlo 33%
• Multi-scattering 33%
• Fitting Formula 33%

Physics

• Electron Beam 100%
• Thin Films 100%
• Radiation Effect 33%
• Electron Scattering 33%
• Film Thickness 33%
• Energy Transfer 33%
• Atomic Collision 33%
• Scattering Theory 33%

Engineering

• Cross Section 100%
• Thin Films 100%
• Radiation Effect 50%
• Key Parameter 50%
• Atomic Number 50%