Atomic-level analytical electron microscopy of diffusional phase transformations

M. Watanabe; D. B. Williams; M. G. Burke

Atomic-level analytical electron microscopy of diffusional phase transformations

M. Watanabe
, D. B. Williams
, M. G. Burke

Research output: Contribution to conference › Paper › peer-review

4 Scopus citations

Abstract

Analytical electron microscopes (AEM) employing X-ray energy dispersive spectrometry (XEDS) and/or electron energy-loss spectrometry (EELS) are essential tools to characterize diffusion phase transformations of materials. In this paper, recent progress in materials characterization by the AEM will be reviewed, along with several demonstrations of analyses pertinent to diffusional phase transformations. Advances in thin-film analysis will be described including (i) the latest approaches for elemental mapping including spectrum imaging, (ii) the current status of quantification methods, (iii) applications of advanced statistical analysis and (iv) the effect of the development of spherical-aberration correctors for electron microscopes. Such hardware and software developments should permit quantitative elemental mapping of impurity distributions in materials with atomic-scale spatial resolution and with atomic-level detection sensitivity.

Original language	English
Pages	431-442
Number of pages	12
State	Published - 2005
Externally published	Yes
Event	International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2005 - Phoenix, AZ, United States Duration: May 29 2005 → Jun 3 2005

Conference

Conference	International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2005
Country/Territory	United States
City	Phoenix, AZ
Period	05/29/05 → 06/3/05

Keywords

Elemental mapping
Multivariate statistical analysis
Quantitative X-ray analysis
Spectrum imaging
Spherical aberration correction
ζ(zeta)-factor method

Cite this

@conference{5236d30c3cbf4503a13ec4b0390f0675,

title = "Atomic-level analytical electron microscopy of diffusional phase transformations",

abstract = "Analytical electron microscopes (AEM) employing X-ray energy dispersive spectrometry (XEDS) and/or electron energy-loss spectrometry (EELS) are essential tools to characterize diffusion phase transformations of materials. In this paper, recent progress in materials characterization by the AEM will be reviewed, along with several demonstrations of analyses pertinent to diffusional phase transformations. Advances in thin-film analysis will be described including (i) the latest approaches for elemental mapping including spectrum imaging, (ii) the current status of quantification methods, (iii) applications of advanced statistical analysis and (iv) the effect of the development of spherical-aberration correctors for electron microscopes. Such hardware and software developments should permit quantitative elemental mapping of impurity distributions in materials with atomic-scale spatial resolution and with atomic-level detection sensitivity.",

keywords = "Elemental mapping, Multivariate statistical analysis, Quantitative X-ray analysis, Spectrum imaging, Spherical aberration correction, ζ(zeta)-factor method",

author = "M. Watanabe and Williams, \{D. B.\} and Burke, \{M. G.\}",

year = "2005",

language = "English",

pages = "431--442",

note = "International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2005 ; Conference date: 29-05-2005 Through 03-06-2005",

}

TY - CONF

T1 - Atomic-level analytical electron microscopy of diffusional phase transformations

AU - Watanabe, M.

AU - Williams, D. B.

AU - Burke, M. G.

PY - 2005

Y1 - 2005

N2 - Analytical electron microscopes (AEM) employing X-ray energy dispersive spectrometry (XEDS) and/or electron energy-loss spectrometry (EELS) are essential tools to characterize diffusion phase transformations of materials. In this paper, recent progress in materials characterization by the AEM will be reviewed, along with several demonstrations of analyses pertinent to diffusional phase transformations. Advances in thin-film analysis will be described including (i) the latest approaches for elemental mapping including spectrum imaging, (ii) the current status of quantification methods, (iii) applications of advanced statistical analysis and (iv) the effect of the development of spherical-aberration correctors for electron microscopes. Such hardware and software developments should permit quantitative elemental mapping of impurity distributions in materials with atomic-scale spatial resolution and with atomic-level detection sensitivity.

AB - Analytical electron microscopes (AEM) employing X-ray energy dispersive spectrometry (XEDS) and/or electron energy-loss spectrometry (EELS) are essential tools to characterize diffusion phase transformations of materials. In this paper, recent progress in materials characterization by the AEM will be reviewed, along with several demonstrations of analyses pertinent to diffusional phase transformations. Advances in thin-film analysis will be described including (i) the latest approaches for elemental mapping including spectrum imaging, (ii) the current status of quantification methods, (iii) applications of advanced statistical analysis and (iv) the effect of the development of spherical-aberration correctors for electron microscopes. Such hardware and software developments should permit quantitative elemental mapping of impurity distributions in materials with atomic-scale spatial resolution and with atomic-level detection sensitivity.

KW - Elemental mapping

KW - Multivariate statistical analysis

KW - Quantitative X-ray analysis

KW - Spectrum imaging

KW - Spherical aberration correction

KW - ζ(zeta)-factor method

UR - https://www.scopus.com/pages/publications/33645212082

M3 - Paper

AN - SCOPUS:33645212082

SP - 431

EP - 442

T2 - International Conference on Solid-Solid Phase Transformations in Inorganic Materials 2005

Y2 - 29 May 2005 through 3 June 2005

ER -

Atomic-level analytical electron microscopy of diffusional phase transformations

Abstract

Conference

Keywords

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