TY - GEN
T1 - Accurate thermoreflectance imaging of nano-features using thermal decay
AU - Kendig, Dustin
AU - Hohensee, Gregory
AU - Pek, Ella
AU - Kuang, Wan
AU - Yazawa, Kazuaki
AU - Shakouri, Ali
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/25
Y1 - 2017/7/25
N2 - Thermal characterization of nano-featured devices is a critical challenge for the development of high performance devices. Although far-field thermoreflectance imaging is limited in spatial resolution by the optical diffraction limit, it is more amenable to absolute temperature calibration of plasmonic devices than existing near-field scanning probe tip methods. We have built an advanced thermoreflectance microscope capable of 50 ns time-resolved, diffraction-limited temperature imaging that can account and correct for thermal expansion, sample drift, numerical aperture, and polarization induced variations in the apparent thermoreflectance coefficient of nanoscale structures. We developed a per-pixel transient calibration technique using this microscope to measure the absolute temperature of an operating heat-assisted magnetic recording (HAMR) head, including features as narrow as 200 nm. The resulting temperature information can be used to experimentally validate numerical models in the design process of such plasmonic devices.
AB - Thermal characterization of nano-featured devices is a critical challenge for the development of high performance devices. Although far-field thermoreflectance imaging is limited in spatial resolution by the optical diffraction limit, it is more amenable to absolute temperature calibration of plasmonic devices than existing near-field scanning probe tip methods. We have built an advanced thermoreflectance microscope capable of 50 ns time-resolved, diffraction-limited temperature imaging that can account and correct for thermal expansion, sample drift, numerical aperture, and polarization induced variations in the apparent thermoreflectance coefficient of nanoscale structures. We developed a per-pixel transient calibration technique using this microscope to measure the absolute temperature of an operating heat-assisted magnetic recording (HAMR) head, including features as narrow as 200 nm. The resulting temperature information can be used to experimentally validate numerical models in the design process of such plasmonic devices.
KW - Heat-assisted magnetic recording
KW - Nanoscale thermal imaging
KW - Thermal decay
KW - Thermoreflectance
UR - https://www.scopus.com/pages/publications/85034454153
U2 - 10.1109/ITHERM.2017.7991852
DO - 10.1109/ITHERM.2017.7991852
M3 - Conference contribution
AN - SCOPUS:85034454153
T3 - Proceedings of the 16th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017
SP - 23
EP - 29
BT - Proceedings of the 16th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th IEEE InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017
Y2 - 30 May 2017 through 2 June 2017
ER -